SiC coated graphite base / MOCVD DISC / SiC coating / oxidation resistant coating / epitaxial disk

SiC coated graphite base has the characteristics of high temperature resistance, oxidation resistance, erosion resistance, high purity, acid and alkali salt resistance and organic reagent resistance, with stable physical and chemical properties. Compared with high-purity graphite, high-purity graphite begins to undergo strong oxidation at 400 ℃. Even if the temperature is not high, the powder will fall off due to oxidation in long-term application, which will attach to the workpiece and table or pollute the environment. Therefore, SiC coated graphite base is gradually replacing high-purity graphite as a new consumable material in MOCVD equipment, powder sintering, heating elements and other processes.

Main features:

1. High temperature oxidation resistance: oxidation resistance, when the temperature is up to 1600 ℃, the oxidation resistance is still very good;

2. High purity: prepared by chemical vapor deposition under high temperature chlorination condition;

3. Erosion resistance: high hardness, dense surface and fine particles;

4. Corrosion resistance: resistant to acid, alkali, salt and organic reagent;

5. SiC surface layer is β - SiC, which belongs to face centered cubic.

6. Vapor deposition method, uniform coating thickness.